Chemical Mechanical Polishing in Silicon Processing: Vol 63 by Shin M. Hwa Li,Robert M. Miller

, , Comments Off on Chemical Mechanical Polishing in Silicon Processing: Vol 63 by Shin M. Hwa Li,Robert M. Miller

By Shin M. Hwa Li,Robert M. Miller

when you consider that its inception in 1966, the sequence of numbered volumes often called Semiconductors and Semimetals has extraordinary itself throughout the cautious number of recognized authors, editors, and participants. The Willardson and Beer sequence, because it is celebrated, has succeeded in generating quite a few landmark volumes and chapters. not just did a lot of those volumes make an impression on the time in their book, yet they remain well-cited years after their unique unencumber. lately, Professor Eicke R. Weber of the collage of California at Berkeley joined as a co-editor of the sequence. Professor Weber, a well known professional within the box of semiconductor fabrics, will extra give a contribution to carrying on with the sequence' culture of publishing well timed, hugely proper, and long-impacting volumes. a few of the fresh volumes, similar to Hydrogen in Semiconductors, Imperfections in III/V fabrics, Epitaxial Microstructures, High-Speed Heterostructure units, Oxygen in Silicon, and others promise that this practice could be maintained or even expanded.
Reflecting the actually interdisciplinary nature of the sphere that the sequence covers, the volumes in Semiconductors and Semimetals were and should remain of significant curiosity to physicists, chemists, fabrics scientists, and gadget engineers in glossy industry.

Show description

Read or Download Chemical Mechanical Polishing in Silicon Processing: Vol 63 (Semiconductors and Semimetals) PDF

Best optical engineering books

Introduction to Solid-State Lighting

A radical reference that sheds gentle at the promising box of solid-state lighting fixtures Solid-state lights is a quickly rising box. gentle Emitting Diodes are already utilized in site visitors signs, signage/contour lighting fixtures, huge zone screens, and automobile functions. yet its maximum destiny lies within the threat of employing solid-state lamps to common lights.

Transparent Electronics

This monograph is the 1st roadmap for obvious electronics. It defines and assesses what and the place the sector is, the place it really is going, and what must ensue to get it there. even though the valuable concentration of this monograph includes obvious electronics, a few of the fabrics, units, circuits, and strategy integration recommendations mentioned could be of serious curiosity to researchers operating in different rising fields, together with revealed electronics, large-area electronics, inexpensive electronics, and disposable electronics.

Lithium Niobate Photonics

This new source offers the thoughts, applied sciences, and layout options for units according to the electro-optic impression in lithium niobate. It bridges from the speculation of photonics and electro-optics, to the perform of electro-optic equipment layout and alertness. there's an emphasis on functional research utilizing smooth modeling instruments.

Additional resources for Chemical Mechanical Polishing in Silicon Processing: Vol 63 (Semiconductors and Semimetals)

Sample text

Download PDF sample

Rated 4.46 of 5 – based on 16 votes